| 摘要 |
PURPOSE:To minimize connection errors among a plurality of deflection regions when the deflection regions are connected mutually by making much account of the quantity of deflection strain at a spot of maximum quantity of deflection in the deflection regions and weighting the quantity of deflection strain at the spot and correcting deflection strain when a deflection-strain correction factor is to be calculated. CONSTITUTION:First correction factors a1-a10 and b1-b10 are obtained through the same method as a conventional method, each measuring point is given weighted coefficients n(i, j), and S, Sx' and Sy' represented by formula are acquired by using the weighted coefficients. A normal equation is prepared by employing these relation- ship, a novel correction factor is obtained by solving the equation, these correction factors are set to a correction arithmetic circuit 3, and lithographing is executed. When the weighted coefficient at the time of i=1, i=NX, j=1 or j=NY is represented by 10 and weighted coefficients at other spots by 1 in n(i, j), the result of correction takes a shape that the quantity of strain at the maximum spot of deflection of deflection regions is minimized, thus reducing connection errors of patterns connected among the deflection regions.
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