| 摘要 |
PURPOSE:To give both characteristics of high saturation magnetic flux density and high electric resistance by forming a soft magnetic thin-film in hetero- amorphous two phase structure, which has a composition consisting of at least one kind of Fe, Co and Ni and B, C and Si and in which the rate of each element is specified. CONSTITUTION:x, y and z in MxLyJz each represent the rate of respective element at an atomic %, and x+y+z=100, y+z>=10, xnot equal to 0, ynot equal to 0 and znot equal to 0 hold. One kind or two kinds or more of 3d transition metallic elements. Fe, Co and Ni, as a ferromagnetic material are proper as M. On the other hand, two kinds are selected from B, Si and C and used as L and J as a semimetallic element. Ten atomic % or more are required as the rate y+z occupied by the semimetallic elements L and J, and an amorphous state is not realized at ten atomic % or less. The soft magnetic thin-film is shaped in two-phase mixed structure of ferromagnetic amorphous phase I (M-L-J) mainly comprising the transition metallic element M and nonmagnetic amorphous phase II (L-J).
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