| 摘要 |
PURPOSE:To produce the title high-strength pyrolytic carbon having a microstructure by introducing a raw gas preheated to a temp. lower than that of a substrate from a gas inlet passage of a specified size onto the substrate which is arranged in a cold wall-type furnace and heated. CONSTITUTION:The substrate 13 consisting of artificial graphite, etc., is arranged in the reaction tube 10 of the cold wall-type furnace, and preferably heated to >=about 1,400 deg.C by the high-frequency heating method using a high-frequency work coil 14. The raw gas, obtained by diluting methane, etc., with nitrogen, etc., is introduced through one or more gas inlet passages 8 formed by boring a hole through a carbonaceous block. Each of the inlet passages 8 has the <=1/10 times cross-sectional area for that of the reaction tube 10 in the traveling direction of the raw gas, and has the >=1/5 times length for that of the substrate 13. The gas inlet passages 8 are heated by the high-frequency work coil 14, and the raw gas is preheated to a temp. lower than that of the substrate 13 and then introduced onto the substrate 13. As a result, the pyrolytic carbon having excellent mechanical strength and a microstructure is deposited on the substrate 13. |
