| 摘要 |
PURPOSE:To attain highly accurate positioning even if a fine positioning device produced on the basis of normal working accuracy and assembling accuracy is used by arranging a characteristics compensating operation part or the like between an object displacement setting part and a fine positioning device. CONSTITUTION:The object displacement setting part 41 outputs the object displacement of a prescribed point in the fine positioning device 40 to the characteristics compensating operation part 42. The operation part 42 executes prescribed operation based upon the inputted object displacement and outputs the driving voltages of respective fine movement units for generating required displacement on a reference point of the device 40. When objective displacement is inputted to the setting part 41, the operation part 42 computes the fine movement unit to be displaced and the voltage to be applied and outputs the driving voltages of respective fine movement units to the device 40. Even if a fine positioning device produced at normal working and assembling accuracy is used, highly accurate displacement can be obtained. In addition, the accuracy can be furthermore improved by connecting an adding means or the like between the setting part 41 and the operation part 42 or between the device 40 and the operation part 42.
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