| 摘要 |
PURPOSE:To make pressure in a gas main pipeline and oxygen main pipeline so as not to be varied even if a gas flow rate and an oxygen flow rate into a deposition gas burner is varied, by installing a reserve tank between a main pipeline in a feed pipe feeding combustion gas from the main pipeline to the deposition gas burner and a flow regulator. CONSTITUTION:A gas reserve tank 25 is installed between a gas main pipeline 20 in a gas fed pipe 27 leading to a deposition gas burner 3b from the gas main pipeline 20 and a gas flow regulator 17. An oxygen reserve tank 26 is installed between an oxygen main pipeline 21 in an oxygen feed pipe 28 leading to the deposition gas burner 3b from the oxygen main pipeline 21 and an oxygen flow rate adjuster 18. Each capacity of the gas reserve tank 25 and the oxygen reserve tank 26 is set to be sufficiently larger each variation of both and oxygen flow rates to be used for the deposition gas burner 3b each. With this constitution, even if the gas flow rate being fed to the deposition gas burner 3b from the gas main pipeline 20 is varied by the gas flow rate regulator 17, pressure in the gas main pipeline 20 is in no case varied.
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