| 摘要 |
PURPOSE:To make a measurement applying high frequency signal and speed-up of measurement possible, by arranging the fixing part of a probe pin mounted on a probe card in the upper part almost vertical to the measuring pad of a body to be measured. CONSTITUTION:When, on a test head 2 and a probe card 3, a fine hole 8 is made so as to have no effects of impedance on the arrangement of a probe pin 5, an optical fiber 7, for example, a large aperture optical fiber, is inserted into the hole 8, and the condition of positioning is observed by arranging a fiber scope almost right above the probe pin 5. As the observation of contact condition between the measuring pad of a body to be measured and the tip of the probe pin 5 is performed via the optical fiber 7, the impedance due to a stray capacitance can be restricted within a low value. Thereby, measurement applying high frequency signal is enabled, and speed-up of measurement is realized.
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