| 摘要 |
PURPOSE:To permit such measurement which minimizes thermal influence of a coating material by using a platinum wire the surface of which is coated with aluminum nitride as a probe. CONSTITUTION:The aluminum nitride has high heat conductivity and can transmit calorific value quickly to a semiconductor melt to be measured by energizing a fine platinum wire even if the fine platinum wire is coated with the aluminum nitride. For example, the surface of the fine platinum wire having 1,400mum diameter is coated with the aluminum nitride to 30mum thickness and the thermal diffusivity of molten indium antimonide is measured by a nonstationary fine wire method using such fine wire as the probe in common use as a heating element. The thermal diffusivity can then be measured at 1% error as compared to the theoretical value of the case in which there is no coating material. The measurement error by the presence of the coating material is, therefore, restricted within a permissible range.
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