| 摘要 |
PURPOSE:To prevent pinholes or cracks from being generated in a protective film and prevent oxidation of electrodes or a heat generating resistor film, or electrolytic wear of the protective film at high temperature, by providing an electrically insulating, heat-resistant first protective film and providing a conductive, wear-resistant second protective film thereon. CONSTITUTION:A heat generating resistor film 2 is provided in a predetermined pattern on a head base 1, and electrodes for applying currents are provided in a predetermined pattern thereon. A first protective film 4 is provided on the electrodes 3 and on exposed parts of the resistor film 2, and a second protective film is provided thereon. The first protective film 4 is formed of an electrically insulating, heat-resistant material such as an SiO2-based material, and is provided in a film thickness of 0.2-2mum by a vacuum process such as vapor deposition and sputtering, or by a series of coating, drying and firing processes under the atmospheric pressure. The second protective film is formed of a conductive, wear-resistant material such as TiN and an inorganic material comprising TiN as a main constituent, and is provided in a film thickness of 1-3mum by a DC magnetron sputtering process. |
