| 摘要 |
PURPOSE:To easily clean a liquid nitrogen shroud in a growth chamber in a field of a molecular beam crystal growth thereby to reduce a surface defect and to prevent an evaporating material from being contaminated by coating the shroud with a fluorine resin, and chemically cleaning it when an adhered material is deposited in a large quantity. CONSTITUTION:A molecular beam crystal growing apparatus is composed with a liquid nitrogen shroud coated with a film made of an organic substance having medicine resistance and heat resistance. That is, the shroud 6 in a growing chamber is provided with a thin film 7 coated, for example, with fluorine resin, the shroud 6 is removed from the medicine resistance of the resin from the apparatus, immersed in a medicine for dissolving the adhered material to chemically remove the material on the surface. Thus, the surface of the shroud becomes new and clean to eliminate the generation of powdery dusts.
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