发明名称 VACUUM DEPOSITION APPARATUS
摘要 PURPOSE:To enhance the adhesive power of a strip during vacuum deposition by placing a discharge electrode made of the same metal as a metal to be vacuum-deposited and by causing electric discharge so as to remove an oxide surface layer from the strip and to form a thin metallic film on the strip before vacuum deposition. CONSTITUTION:The strip 2 inlets and outlets of vacuum treatment chambers 4A, 4B are sealed with differential pressure type sealing devices. In the chamber 4A, 4B, a discharge electrode 13 made of the same metal as a metal to be vacuum-deposited on the strip 2, e.g., zinc is placed opposite to the strip 2 passing through the chamber 4A, and AC voltage is impressed between the electrode 13 and electrically conductive strip guides 15 to cause electric discharge between the electrode 13 and the strip 2.
申请公布号 JPS63114962(A) 申请公布日期 1988.05.19
申请号 JP19860259942 申请日期 1986.10.31
申请人 SUMITOMO HEAVY IND LTD 发明人 SAKAMI TOSHIYUKI;AWAI KIYOSHI
分类号 C23C14/32;C23C14/02;C23C14/54;C23C14/56 主分类号 C23C14/32
代理机构 代理人
主权项
地址