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发明名称	COATING WITH PHOTORESIST
摘要
申请公布号	JPS63114295(A)	申请公布日期	1988.05.19
申请号	JP19860260257	申请日期	1986.10.31
申请人	SEIKO EPSON CORP	发明人	SAKURAI KAZUNORI
分类号	H05K3/06;G03F7/16;H01L21/027;H01L21/30	主分类号	H05K3/06
代理机构		代理人
主权项
地址

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