发明名称 HIGH-SPEED FIELD EFFECT SEMICONDUCTOR DEVICE
摘要 PURPOSE:To increase energy difference between conduction bands by providing a channel layer of an undoped III-V compound semiconductor and a carrier supply layer of an impurity-doped II-VI compound semiconductor. CONSTITUTION:A channel layer 2 consisting of an un-doped III-V compound semiconductor formed onto a substrate 1 and a carrier supply layer 3, which is shaped onto the channel layer 2, electron affinity of which is smaller than the channel layer, an energy-band-gap of which is larger than the channel layer and which is composed of an impurity-doped II-VI compound semiconductor, are formed. Consequently, since energy difference between the conduction bands of the channel layer 2 and the carrier supply layer 3 is increased extremely, carriers in a two-dimensional carrier-gas layer 7 are not moved to the carrier supply layer 3 even under the state in which high voltage is applied between source-drain, thus allowing stable operation. Carrier-gas concentration in the two-dimensional carrier-gas layer 7 is augmented, thus extracting large currents.
申请公布号 JPS63114176(A) 申请公布日期 1988.05.19
申请号 JP19860258147 申请日期 1986.10.31
申请人 FUJITSU LTD 发明人 TAKIGAWA MASAHIKO
分类号 H01L29/812;H01L21/20;H01L21/338;H01L29/267;H01L29/778 主分类号 H01L29/812
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