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发明名称
KALIBRIERPUNKTE FUER DIE AUSRICHTUNG EINES WAFER-PRUEFKOPFES.
摘要
申请公布号
DE220233(T1)
申请公布日期
1988.05.19
申请号
DE19860902664T
申请日期
1986.04.07
申请人
SGS SEMICONDUCTOR CORP., PHOENIX, ARIZ., US
发明人
LEUSCHNER, HORST, PHOENIX, AZ 85023, US
分类号
G01R31/00;(IPC1-7):G01R31/00
主分类号
G01R31/00
代理机构
代理人
主权项
地址
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