| 摘要 |
PURPOSE:To allow a chemical reaction to stably process on the surface of a substrate by arranging a light transmitting film which is unidirectionally movable on the inside of the light incident window part of the title photochemical reaction utilizing device to cover the window part, and providing a deposit removing means. CONSTITUTION:In the photochemical reaction utilizing device, the plastic film 24 capable of transmitting light is provided on the inside of the light incident window part 23 of a reaction chamber 21. The plastic film 24 is sent in from a delivery roll 25 placed on the outside of the reaction chamber 21 through a slit 26, and sent out to the outside through a slit 27. The film 24 is further sent into an etching chamber 28, and the reaction product deposited on the surface is continuously removed by etching. As a result, the clouding of the light incident window part 23 due to the reaction is prevented over a long period, and the chemical reaction on the surface of a substrate 41 can be allowed to proceed stably.
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