发明名称 WASHER
摘要 PURPOSE:To perform washing without generating defective washes by supporting the end sections of both sides of the wash passing through a drying section by a carrying passageway and drying the wash by a heating atmosphere formed onto the carrying passageway. CONSTITUTION:A relief section 5e is notched to the upper surface of a carrying passageway 1 in a drying section 5 so that a wash 2 is not brought into contact with the carrying passageway 1 in approximately overall width except outer frames 2d in the end sections of both sides of the wash 2. Consequently, the greater part of the wash 2 are not brought into contact with the carrying passageway 1 in the drying section 5 while being dried by a heating atmosphere shaped onto the carrying passageway 1. Accordingly, the vibrations of the wash 1 resulting from frictional resistance to the carrying passageway 1 of the wash 2 and the boiling, etc., of droplets interposed in the contact sections of the carrying passageway 1 with the wash 2 are prevented, thus performing washing without causing the generation, etc., of defectives resulting from the vibrations of the wash 2.
申请公布号 JPS63114155(A) 申请公布日期 1988.05.19
申请号 JP19860258292 申请日期 1986.10.31
申请人 HITACHI LTD;HITACHI YONEZAWA DENSHI KK 发明人 KUROSAWA TAKAO
分类号 H01L23/50;B08B13/00;H01L21/304 主分类号 H01L23/50
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