| 摘要 |
PURPOSE:To prevent exfoliation of a protective layer and prevent defective contact between a printing part and a controlling circuit part, by providing the printing part with a heat generating resistor layer and/or a thin-film electrode layer between thick- film electrodes of the controlling circuit part which comprise gold as a main constituent and the protective layer of the printing part. CONSTITUTION:A glass paste and a gold paste are screen printed on an insulating substrate 1, and are baked in air to provide a mesa form glaze layer 1a and thick-film electrodes 6. Masking by a metallic mask 7 is so performed that the parts of the electrodes 6 of a controlling circuit part B for connection with a printing part A are left exposed, and a heat generating resistor layer 2 is provided by a thin-film system such as a sputtering method. By use of a metallic mask 7', a thin-film electrode layer 3 of an aluminum alloy or the like is provided by a thin-film system. A resist pattern is provided on the thin-film electrode layer 3 so as to obtain the same pitch as that of the pattern of the thick-film electrodes 6 at a connecting part C, and unrequired parts of the layer 3 and the resistor layer 2 are removed by etching. Then, a protective layer 4 is provided by using a metallic mask 7''. Finally, a controlling IC 5 is fixed on the substrate 1, and is connected to the thick-film electrodes 6. |
