| 摘要 |
PURPOSE:To make it possible to simplify the arrangement of a surface polishing device, by mounting an ultrasonic transducer on an upper stool through the intermediary of a transmitting medium made of solid materials, and by carrying out both compensation of applied pressure and control of the processed thickness of a workpiece in accordance with a signal from the transducer. CONSTITUTION:An ultrasonic transducer 31 is attached to an upper stool 11 through the intermediary of a transmitting medium 30 made of solid materials such as metal, glass, synthetic resin or the like. A control device 26 allows the transducer 31 to transmit ultrasonic waves and measures the thickness or weight of the upper stool 11 in accordance with echoes of the ultrasonic waves reflecting upon the interface between the transmitting medium 30 and a workpiece 16 so as to control a pressure control valve 27 so that the application pressure of a pressurizing cylinder 25 is compensated in accordance with a variation in the thickness of the upper stool 12. Further, the thickness of the workpiece is measured in accordance with echoes reflecting back from the interface between the transmitting medium 30 and the workpiece 16 and the interface between the workpiece 16 and the upper stool 12 so as to perform the control of predetermined dimensions in accordance with thus measured value. Thus, it is possible to simplify the arrangement of the device, and to stably transmit ultrasonic waves, thereby it is possible to enhance the efficiency of polishing. |
