| 摘要 |
PURPOSE:To eliminate mis-alignment of patterns by accumulation of electric charge and to permit formation of the patterns with high accuracy by adding a photosensitive agent and binder to polyvinyl carbazole (PVCz) and curing the mixture by UV light. CONSTITUTION:A flattening material prepd. by adding the photosensitive agent and binder to the PVCz is used in the process for forming the resist having the two-layered structure by electron rays. Said material is cured by the UV light. The PVCz having about 100,000-1,500,000mol.wt. is preferably used and is dissolved together with the photosensitive agent and binder into a suitable solvent, for example, a liquid mixture composed of monochlorobenzene/O- dichlorobenzene to prepare a coating soln. Such soln. is coated by a casting method, more preferably spin coating method. The useful photosensitive agent is an azide compd. which is soluble in the solvent for the PVCz. The mis- alignment of the patterns is thereby decreased. |
