发明名称 MANUFACTURE OF THIN FILM MAGNETIC HEAD
摘要 PURPOSE:To prevent exfoliation of an upper magnetic layer due to heat treatment by forming a gas vent hole selectively to a part other than magnetic pole forming scheduled region prior to the heat treatment of the upper magnetic layer and adopting the process to expose the insulation layer. CONSTITUTION:A gap layer 13, a lower magnetic pole 12, an insulation layer 14, a thin film coil 15 and an insulation layer 16 are formed on a nonmagnetic base 11 sequentially, and a resist mask 21 having a hole other than the magnetic pole forming schedule region is formed on the upper magnetic substance layer 18 coated on the entire face of base. The surface of the base is subjected to etching processing to form a gas vent hole 22 to expose the insulation layer 16. In applying heat treatment to the magnetic layer 18 in a rotating magnetic field, a gas generated in the insulation layers 14, 16 is discharged from the gas vent hole 22, then the magnetic layer 18 is exfoliated and the magnetic head with excellent reliability is manufactured with excellent yield.
申请公布号 JPS63113911(A) 申请公布日期 1988.05.18
申请号 JP19860261172 申请日期 1986.10.31
申请人 FUJITSU LTD 发明人 KOBAYASHI KAZUO
分类号 G11B5/31 主分类号 G11B5/31
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