发明名称 SPECTROMETER DETECTOR FOR QUANTITATIVE POTENTIAL MEASUREMENT
摘要 The spectrometer detector arrangement according to the invention consists essentially of an electrostatic opposing field spectrometer (SP) and a semiconductor detector (DT) arranged directly above the spectrometer (SP), concentrically with respect to the beam axis (OA). The annular semiconductor detector (DT) is constructed in segments, the regions (ES) which are sensitive to particles being arranged symmetrically with respect to the beam axis (OA) and preferably being designed as a metal-semiconductor junction or as a p-n junction. <IMAGE>
申请公布号 JPS63114037(A) 申请公布日期 1988.05.18
申请号 JP19870254526 申请日期 1987.10.08
申请人 SIEMENS AG 发明人 YURUGEN FUROOJIEN;EERITSUHI PURIISU;RAINHARUTO WAIRU
分类号 G01R19/00;G01N23/22;G01R31/302;H01J37/244;H01L21/66 主分类号 G01R19/00
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