| 摘要 |
PURPOSE:To raise the reliability, and also, to obtain the high density by forming a conductor coil by embedding a metallic film into the groove of an insulating film which is formed in advance, so that insulating layer can be filled exactly between coil wires. CONSTITUTION:An insulating film 2 is formed by a prescribed film thickness on a substrate 1, and a photoresist pattern 3 is formed thereon. Subsequently, by using the photoresist pattern 3 as a mask material, a groove 20 is formed on the insulating film 2 by dry method. This groove 20 is the same pattern as a pattern of a conductor coil. Thereafter, the photoresist is eliminated by etching, and on the whole surface of the insulating film 2, a plating surface 4 is formed. A metallic film 5 which becomes the conductor coil is formed on its whole surface by a plating method, and thereafter, its whole surface is eliminated to the insulating layer formed part by an etch-back method, and a coil pattern is formed. In such a way, the metallic film 5 is formed in the groove 20 without filling a resin between the coils, thereafter, the generation of an air-foam, based on the fluidity failure of the resin can be prevented.
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