| 摘要 |
PURPOSE:To realize a high performance sensor having good linearity and no histeresis, by allowing the force applied to the sensor to act on a strain generator having a diaphragm through a spherical pressurizing part. CONSTITUTION:When a tactile sensation sensor contacts with an object to receive a force, the force applied to the sensor through an elastomer 3 acts on a strain generator provided with a cavity 9 through a spherical pressurized part 2 to generate strain in the strain generator 1. A pressure-sensitive element 5 converts the strain generated in the strain generator 1 to an electric signal and said strain is taken out as output voltage. Since the pressurizing part 2 is spherical, the area of the contact part of the force applied from the outside with the strain generator can be reduced.
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