发明名称 VACUUM SUCTION CYLINDER
摘要 PURPOSE:To make the full automation of a plate separation work performable, by making laminated plates so as to separate off without entailing any dent and fold failure in a thin laminate through functions of a vacuum suction cylinder for separating the multilayer material laminate from a mirror surface. CONSTITUTION:A vacuum connecting port 12 of a suction cylinder is connected to a vacuum pump system, and if a pump is operated in a state of leaving an opening 8 opened intact, a second cylinder chamber 5 comes to decompression, and an air inflow rate of the opening 8 is large to displacement of a first exhaust port 10, whereby a first cylinder chamber 4 will not come to decompression, so that a piston 2 goes down, compressing a coil-form spring 6, and it comes to a stop. Next, when the opening 8 is closed, the first cylinder chamber 4 comes to decompression, and the piston 2 goes up by dint of the compressed spring 6. The vertical motion of this piston 6 can be adjusted of its speed and the time required for the vertical motion by adjusting the displacement after adjusting insertion of an adjusting needle 13 into the first exhaust port 10.
申请公布号 JPS63112337(A) 申请公布日期 1988.05.17
申请号 JP19860261348 申请日期 1986.10.31
申请人 HITACHI CHEM CO LTD 发明人 NAKAYAMA HIDEO;TSUNODA KAZUYOSHI;ODASHIRO TETSUO;YOSHIDA HAJIME;AMANO MASAYUKI
分类号 B65H3/08;B25J15/06 主分类号 B65H3/08
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