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发明名称
摘要
申请公布号
JPS6373929(U)
申请公布日期
1988.05.17
申请号
JP19860167720U
申请日期
1986.10.30
申请人
发明人
分类号
G06K7/00;H01L21/02;(IPC1-7):H01L21/02
主分类号
G06K7/00
代理机构
代理人
主权项
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