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发明名称
摘要
申请公布号
JPS6373939(U)
申请公布日期
1988.05.17
申请号
JP19860168764U
申请日期
1986.10.31
申请人
发明人
分类号
H01L21/288;H01L21/321;H01L21/60;(IPC1-7):H01L21/92
主分类号
H01L21/288
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