| 摘要 |
PURPOSE:To enable the heating to a desired temperature for a short time for only a part too close to a boundary surface between a resist and a substrate, by effectively radiating laser rays on this boundary surface. CONSTITUTION:Laser beams emitted from a laser beam source 1 are made to pass through a lens system 2 and reflected on a vibrating mirror 3 and radiated on a surface of a substrate 5 coated with a resist 4. Then, the laser beams are focused by a lens system 2 so that a focusing point comes too close to a boundary surface between the resist 4 and the substrate 5. while the beams are vibrated with a full swing angle in the X direction of the substrate by the vibrating mirror 3, the surface of the substrate 5 is uniformly scanned with laser beams by moving a XY table 6, on which the substrate 5 is mounted, in the Y direction synchronously with the vibration in the X direction, so that the surface of the substrate is uniformly heated. Hence, the part of the boundary surface between the resist and the substrate can be heated limitedly to a desired temperature for a short time. |
