| 摘要 |
<p>PURPOSE:To extremely reduce presolution carrying amount to next treating solution thereby to reduce impurity and fine particle carrying amounts to prevent a wafer from being contaminated by omitting a cassette, and providing a wafer supporting holder and a wafer conveying holder. CONSTITUTION:A wafer conveying apparatus has a wafer supporting holder 10 for holding a wafer 2 in a standing state at a home position, and a wafer conveying holder 9 for moving the wafer 2 to other wafer supporting holder. Thus, a wafer cassette can be omitted, and the wafer of one holder 9 can be transferred to other holder 9 through the holder 10. Thus, processing solution carrying amount to next processing solution can be reduced and impurity and fine particle carrying amounts can be accordingly extremely reduced, thereby decreasing the variation in the solution property of the solution.</p> |
