| 摘要 |
PURPOSE:To manufacture a target minimal in internal defects such as pores, and hardly causing cracks and breakage, by subjecting a mixture of specific rare earth metal-base powder and transition metal-base powder to hot compaction in vacuum or in an inert gas at a temp. in a range between the solidus temp. and the temp. lower than the liquidus temp. of the mixture. CONSTITUTION:Respective quantities of a powder consisting of one or more elements among rare earth metals (Gd, Tb, Dy, Ho, Er) or alloy thereof and a powder consisting of one or more elements among transition metals (Fe, Co, Ni) or alloy thereof are regulated so that desired composition is attained, followed by mixing. The resulting powder mixture is compacted in vacuum or in an inert gas at a temp. in a range between the solid phase temp. and the temp. lower than the liquid phase temp. of the mixture, so that liquid phase is developed among the power-constituting grains and the liquid phase is infiltrated into the voids among the grains to undergo intergranular joining. In this way, a sputtering target material combining high density with superior machinability and used for magneto-optical recording medium can be manufactured in high efficiency. |
