| 摘要 |
PURPOSE:To obtain a stable laser output by causing a folded part of an optical axis to be made of a folded block having a passage of a gas flow rate that is equal to that of an electric discharge part as well as a folded reflecting mirror. CONSTITUTION:A gas inflow block 2a of folded reflecting mirror sides 7 and 7a as well as a folded mirror block 8 are incorporated into a folded block 14. The folded block 14 is equipped with the folded reflecting mirrors 7 and 7a that make up a folded part of an optical axis 4; besides, it is provided by a folded passage 13 (shadowed part) so that a gas can flow at a flow rate that is equal to that in a discharge tube 1. Laser beams are amplified along the optical axis 4 but the inside is free of stagnation of the gas because the whole inside is a flow route of a circulating gas. Thus, there is no possibility that the gas is heated by the laser beams and output characteristics of the laser beams can be maintained constant, regardless of time and then a stable laser output is obtained. |
