| 摘要 |
PURPOSE:To cool excellently a laser oscillating means accommodated in a casing together with a device to be cooled without producing an adverse effect on other components of an apparatus and thereby to stabilize the operation thereof, by providing a vessel accommodating the laser oscillating means, a gas introducing means to introduce a cooling gas into the vessel so as to cool the laser oscillating means, and a gas discharging means to discharge the gas having contributed to cooling outside the casing. CONSTITUTION:Air sucked through a suction port 16 is regulated by an air conditioner 20 and sent to an exposure device 12 by a blower device 22 for a main body, while cooling air in the direction of an arrow FA, which is sent toward a duct 24, cools the exposure device 12 and is discharged outside a casing 10 by a discharging device 36. Although the air having cooled the exposure device 12 flows toward a lase oscillator 14, this air is prevented from striking directly against the laser oscillator 14 by the operation of a vessel 26. Cooling air in the direction of an arrow FB passes through the duct 24, is introduced into the vessel 26 by a blower device 28 to cool down the laser oscillator 14, and is discharged outside the casing 10 from a discharge port 18 by the discharging device 36. |
