| 摘要 |
PURPOSE:To accurately detect the electrode position of a semiconductive pellet, by removing the effect due to the reflected image of an unnecessary part. CONSTITUTION:The circumferential image of a semiconductive pellet 10 having an electrode formed to the surface thereof is picked up by a TV camera head 14 to obtain an image signal of a plurality of color components. Next, the difference between the red color component and the blue color component of the video signal obtained is operated by a video signal operation part 16 and the operation result is binarized to be stored in RAM within a position confirming part 17. Subsequently, the difference between the spectral reflectivities of the material quality of the surface of the semiconductive pellet 10 and that of a frame part is utilized to remove the component of the reflected light from the frame part and only the component of reflected light from the surface of the electrode on the surface of the semiconductive pellet 10 is extracted. By this method, the position of the electrode can be detected with high accuracy. |
