| 摘要 |
PURPOSE:To carry out the super-precision machining of an aluminum disk which is an aluminum disk substrate for a computer with high efficiency by carrying out dressing and a prior stage preliminary polishing prior to main polishing using a grinding wheel made of specific abrasive grains and a polishing liquid containing a fatty acid in combination. CONSTITUTION:Grinding wheels 1 which are formed by fixing and molding C abrasive grains which are super-fine abrasive materials finer than JIS #400 are installed on a polishing board 3 consisting of upper and lower face boards 3a, 3b or a lapping machine. The contents of amine fatty acid in a polishing liquid which is fed via a feed pipe 4 is adjusted to be suited to the properties of the grinding wheel 1. And, dressing and prior stage preliminary polishing which is a running-in polishing, are carried out by using an abrasive liquid thus adjusted and, then, pressure, rotating speed, and machining time are set to a reference value to perform a super-fine machining of a defined aluminum substrate (workpiece). |
