| 摘要 |
PURPOSE:To improve sensitivity and to reduce variation in sensitivity with temperature by forming the metallic layer of a paramagnetic body on the surface of a rotary shaft and reducing magnetic flux penetrating the rotary shaft. CONSTITUTION:The metallic layer 2 made of the paramagnetic body is formed on the surface of the rotary shaft 1, a soft magnetic alloy layer 3 which has magnetic strain is formed on the surface of the metallic layer 2, and a coil 4 is arranged concentrically outside the layer across a gap. The metallic layer made of the paramagnetic body is formed preferably by melt-spraying titanium, aluminum, or copper or adhering a metallic thin body on the shaft surface. Thus, the paramagnetic metallic layer is formed on the surface to reduce the magnetic flux entering the rotary shaft. Consequently, the influence of the magnetic flux of the rotary shaft on the inductance of the coil in reduce by the skin effect of the metallic layer to improve the temperature stability of a torque sensor.
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