| 摘要 |
PURPOSE:To easily measure the strain of the surface of a body to be measured such as a wafer, a glass substrate, and a ceramic substrate without any need to bring a probe into contact with the body to be measured by providing a computer which computes the relation between the incidence position of a laser light beam on the surface of the body to be measured and the quantity of the strain of the surface of the body to be measured at the incidence position. CONSTITUTION:The laser light beam 12 impinges on the surface of the body 11 to be measured after its traveling direction is changed by a scanner 16. At this time, the traveling direction after the change is varied with time, and the incidence position 11 on the surface of the body to be measured is shifted with time. The laser light source 12 is reflected by the surface of the body 11 to be measured at this incidence position 21 and photodetected by a position sensor 17. The scanner 16 sends a signal indicating the traveling direction after the change which varies with time to a computer 18 and further the position sensor 17 sends a signal indicating the photodetection position 22 at each point of time to the computer 18, thereby calculating the relation between the incidence position of the laser light beam and the quantity of strain of the surface of the body to be measured arithmetically each point of time.
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