| 摘要 |
PURPOSE:To dispense with the surface layer and the barrier layer of a photosensitive body and to enhance heat resistance and durability by forming an amorphous silicon carbide layer containing a specified amount of each of fluorine and an element of group Va of the periodic table. CONSTITUTION:The photoconductive layer 5 made of amorphous silicon carbide (a-SiC) containing 5X10<-5>-25atom% F and a 0-10,000ppm element of group Va, such as P, of the periodic table, is formed on a substrate 1 to obtain a negatively chargeable photosensitive body. The content of F in the layer 5 is gradually lowered or raised from the substrate 1 side toward the surface. The layer 5 may be composed of a layer region 6a containing F of said amount, and a layer region 7a containing the element of group Va of said amount, and at that time, it is preferred for the region 6a to contain the element of group Va more than the region 7a, and for the region 7a to contain C more than the region 6a. |
