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发明名称
ION IMPLANTATION APPARATUS
摘要
申请公布号
JPS63109166(A)
申请公布日期
1988.05.13
申请号
JP19870162214
申请日期
1987.06.29
申请人
IONETSUKUSU H II I CORP
发明人
NOOMAN ERU TAANAA
分类号
C23C14/48;H01J37/317;H01L21/265;H01L21/68
主分类号
C23C14/48
代理机构
代理人
主权项
地址
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