| 摘要 |
PURPOSE:To determine the end position of a probe needle by a TV camera of a circuit for storing in advance an inner electrode position of a wafer thereby to automatically and effectively inspect the position by deciding it when the probe needle is contacted on the wafer to be tested to inspect the electrode position of the wafer. CONSTITUTION:A wafer 3 to be tested is placed on a wafer chuck 4, and the end of a probe needle 1 on the lower surface of a probe card 2 is first contacted with the wafer 3 to know the position of the internal electrode provided in the wafer 3. In this configuration, TV cameras 5 are arranged at a predetermined interval on the card 2 corresponding to the end of the needle 1, and the electrode position of the wafer 3 is determined by the visual field of the camera 6. Thus, a circuit which has an X-Y direction moving mechanism 7, a pattern recognition processor 8, an information calculator 9, and an information memory 9a is connected to the camera 6, this unit is used to originally position the wafer, and the chuck 4 is made movable in X, Y, Z and theta directions. Thus, the camera 6 and the chuck 7 are relatively moved to detect the electrode position.
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