发明名称 CHARACTERISTIC TESTER FOR SEMICONDUCTOR DEVICE
摘要 PURPOSE:To facilitate positioning at the time of socket replacement and to take a test with high efficiency by providing a positioning means which is mounted on a socket detachably and determines the position of the socket and a semiconductor device conveying means which carries and mounts a semiconductor device on a socket where the positioning means is mounted. CONSTITUTION:The socket 14 is provided on a base 4 while given some degree of freedom and the socket 14 is positioned when replaced by mounting the positioning means on the socket 14. This positioning means 19 is supported on a fixed support member and has constant position relation with the semiconductor device conveying means 27, and the socket 14 where the positioning means 19 also has constant position relation with the semiconductor device conveying means 27. A positioning adjustment is set easily and speedily.
申请公布号 JPS63108279(A) 申请公布日期 1988.05.13
申请号 JP19860253990 申请日期 1986.10.24
申请人 ROHM CO LTD 发明人 ASADA TOMOSHI;FUJIYAMA HIROTOSHI
分类号 H01L21/66;G01R31/26 主分类号 H01L21/66
代理机构 代理人
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