发明名称 ORGANIC FILM FORMING DEVICE
摘要 PURPOSE:To permit incorporation of the titled device into an automated production line by dropping a film forming material on the surface of a developing soln. in a rotating liquid tank and controlling the rotating speed of the liquid tank, thereby forming the solid film of the monomolecules of the film forming material on the surface of the developing soln. CONSTITUTION:The liquid tank 1 which is rotatable and contains the developing soln. 3 and a means for dropping the film forming material to drop the film forming material soln. onto the surface of the developing soln. 3 in the liquid tank 1 are provided to the above-mentioned device. The rotating speed of the liquid tank 1 is controlled to form the solid film of the molomolecules 4 of the above-mentioned film forming material (e.g., stearic acid) on the surface of the developing soln. 3. As a result, the thickness of the monomolecules is increased without using a float and the incorporation of the device into the automated production line is permitted.
申请公布号 JPS63104675(A) 申请公布日期 1988.05.10
申请号 JP19860250976 申请日期 1986.10.21
申请人 MITSUBISHI ELECTRIC CORP 发明人 ENDO SHINJI;NANBA TAKANORI
分类号 H01L21/312;B05C3/02;B05D1/20;H01L51/05;H01L51/40 主分类号 H01L21/312
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