| 摘要 |
PURPOSE:To partly inject a trace amt. of liq. and to eliminate contamination by providing a means for detecting the specified interface position of the liq. in a tube, a means for sending out the tube, and a means for cutting the tip of the tube. CONSTITUTION:The tube 5 is sent out by a delivery roller 10 to suck a liq. chemical 14. A driving motor 1 is driven to a specified position while detecting the interface moving distance by the interface detector 8, and then the tube 5 is pulled in by the delivery roller 10. The tube 5 is sent out by the roller 10 to a discharge vessel to discharge the chemical, the driving motor 1 is driven a slightly longer distance than that in suction to a specified position while detecting the interface moving distance with the interface detector 8, and then the tube 5 is pulled in by the detecting roller 10. The tube 5 is sent out by the delivery roller 10, and cut by a cutter 12.
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