发明名称 Multi-graded aperture masks
摘要 An aperture mask having a grade side and a cone side with a plurality of openings of substantially the same size with the plurality of openings having a grade side partially etched region and a cone side partially etched region surrounding the plurality of openings, the grade side partially etched region surrounding the plurality of openings decreasing from the center of the mask to the periphery of the mask.
申请公布号 US4743795(A) 申请公布日期 1988.05.10
申请号 US19860874098 申请日期 1986.06.13
申请人 BMC INDUSTRIES, INC. 发明人 THOMS, ROLAND
分类号 C23F1/02;H01J9/14;(IPC1-7):H01J29/07 主分类号 C23F1/02
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