| 发明名称 |
Treatment of wastes from high purity silicon process |
| 摘要 |
Method for treating waste slurries containing solid impurities, e.g. in the form of metal chlorides, and silicon tetrachloride and trichlorosilane by evaporation and separation techniques to recover more of the silicon tetrachloride and trichlorosilane.
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| 申请公布号 |
US4743344(A) |
申请公布日期 |
1988.05.10 |
| 申请号 |
US19860844361 |
申请日期 |
1986.03.26 |
| 申请人 |
UNION CARBIDE CORPORATION |
发明人 |
BRENEMAN, WILLIAM C.;YANG, CHI-CHENG;HENNINGSEN, GUNNAR |
| 分类号 |
B09B3/00;C01B33/02;C01B33/021;C01B33/029;C01B33/04;C01B33/08;C01B33/107;C02F1/04;(IPC1-7):B01D3/00 |
主分类号 |
B09B3/00 |
| 代理机构 |
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代理人 |
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