| 摘要 |
PURPOSE:To improve the reproducibility and productivity of an optical functional device in which the refractive index of light is changed according to a change of temp. caused by heat generating resistor electrodes by using tantalum nitride as the principal component in the compsn. of the electrodes so that light can be always deflected at a desired refractive index. CONSTITUTION:An optical function device 1 has a lithium niobate (LiNbO3) substrate 2, a two-dimensional waveguide 3 and two heat generating resistor electrodes 5, 6 stuck parallel to each other on the waveguide 3 with a buffer layer 4 of silicon oxide (SiO2) having a low refractive index in-between. The electrodes 5, 6 are thin films of tantalum nitride (Ta2N) formed by reactive sputtering. When electric power from a first and second power sources 10, 11 is impressed to the electrodes 5, 6, a temp. gradient is produced on the waveguide 3 and a light beam 12 incident on an end 3a of the waveguide 3 is deflected according to the temp. gradient. The resistivity of the electrodes 5, 6 are not changed by a change of temp. and a change with the lapse of time, so light can be always deflected at a desired refractive index by supplying prescribed electric power. |
