| 摘要 |
PURPOSE:To perform more exact control of pulse laser oscillation, by detecting pulse laser beams by a photoelectric conversion element of high responsibility and averaging the detected pulse signal to obtain a pulse average output. CONSTITUTION:Part of pulse laser beams oscillated by a laser oscillator 1 is introduced into an integral sphere 2. In this sphere 2, the pulse laser beams are reflected in multiple numbers on an inner wall surface of the integral sphere and gradually absorbed into a phetoelectric conversion element 3. A beam current corresponding to a pulse change is outputted to an image display device 4 from the element 3. A pulse wave generated in accordance with a change in beam current is displayed on a screen of the device 4 so as to provide pulse wave observation. In a sampling averaging circuit 5, high-speed sampling of the pulse signal outputted from the element 3 is performed at 10 Hz or more so that pulse average output is generated. The pulse average output is inputted as a feedback signal to a pulse oscillation power source 7. In this way, while the pulse wave form is observed, exact control of pulse laser oscillation can be performed. |
