发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To prevent aluminium wirings, etc., from corroding due to moisture permeation by a method wherein, during the bonding process of a semiconductor chip to a leadframe using a high molecular bonding agent or after finishing the bonding process using said high molecular bonding agent, said semiconductor chip and leadframe are exhausted during the wire bonding process. CONSTITUTION:A semiconductor chip 2 is bonded onto a leadframe 1 using a high molecular bonding agent 3 such as silver epoxy paste. The semiconductor chip 2 and the leadframes 1 are connected by wires 4. When the semiconductor chip 2 is bonded to the leadframe 1 using the high molecular bonding agent 3, any decomposing gas is exhausted satisfactorily. Through these procedures, aluminium wirings, etc., can be prevented from corroding due to moisture permeation.
申请公布号 JPS63102328(A) 申请公布日期 1988.05.07
申请号 JP19860248763 申请日期 1986.10.20
申请人 MATSUSHITA ELECTRONICS CORP 发明人 KOYAMA HIROBUMI
分类号 H01L21/52;H01L21/60 主分类号 H01L21/52
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