发明名称 X-RAY GENERATOR
摘要 PURPOSE:To perform induced emission of X rays whose wavelength and direc tion are similar to those of incident X rays so that X-ray output of high bright ness can be obtained by disposing plural pairs of other electrodes for X-ray generation on an optical path of X rays generated between a pair of electrodes. CONSTITUTION:Electrodes 6a and 6b are jointed with a terminal plate 8, and electrodes 7a, 7b, and 4 are jointed with an terminal electrode 9, and one end of the electrode 3 and a terminal plate 8 are jointed with a capacitor 2. X rays are generated as follows: electric charges in the capacitor 2 charged by a high-voltage source 1 are discharged between electrodes 3 and 4, 6a and 7a, 6b and 7b by an operation of a trigger electrode 5. Thus, discharging plasma is formed between respective electrodes, and atoms in the plasma become excited. Part of X rays generated from spot plasma formed between the electrodes 3 and 4 become X rays incident to spaces between 6a and 7a, 6b and 7b, and induce a phenomenon of induced emission, so that respective X rays 11a and 11b are generated in the same direction as the incident X rays.
申请公布号 JPS63102147(A) 申请公布日期 1988.05.07
申请号 JP19860245274 申请日期 1986.10.17
申请人 HITACHI LTD 发明人 ARITA HIROSHI;SUGAWARA HIROYUKI;SUZUKI KOJI;KUROSAWA YUKIO
分类号 H01J35/22;H01L21/027;H01L21/30 主分类号 H01J35/22
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