发明名称 SEMICONDUCTOR MEMORY DEVICE
摘要 PURPOSE:To realize a high-speed operation by a method wherein a p-type and n-type impurity layers are formed to surround a memory circuit element section and the two conductive impurity layers are electrically connected to the output section of a substrate voltage generating circuit. CONSTITUTION:A p-type impurity layer 4 is formed on a silicon substrate 1 by selective thermal diffusion. Next, an n-type impurity layer 5 is formed by selective thermal diffusion. After these processes, or during the formation of the two conductive impurity layers, a memory circuit element section 2, substrate voltage generating circuit 3, and the like are built. The p-type impurity layer 4 and n-type impurity layer 5 are connected to the output section of the substrate voltage generating section 3 by a metal wiring 6. In this way, a negative voltage (approximately -3v) generated by the substrate voltage generating circuit 3 may be applied to a memory circuit substrate 1 through the conductive impurity layers 4 and 5 surrounding the memory circuit 2.
申请公布号 JPS63102359(A) 申请公布日期 1988.05.07
申请号 JP19860248752 申请日期 1986.10.20
申请人 MATSUSHITA ELECTRONICS CORP 发明人 TSUURA KATSUHIKO
分类号 H01L27/04;H01L21/822;H01L21/8242;H01L27/02;H01L27/10;H01L27/108 主分类号 H01L27/04
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