| 摘要 |
PURPOSE:To obtain the title ladder silicone excellent in oxygen plasma resistance and useful as a functional polymer material such as a light- or radiaton- sensitive material, having a specified structural formula. CONSTITUTION:A substituted trichlorosilane or substituted trialkoxysilane containing an organic group having a phenolic hydroxyl group protected in the form of an alkoxy group, a t-butyldimethylsiloxy group, a methylene acetal or the like is obtained by, for example, a process wherein a halide (e.g., benzyl chloride derivative) is condensed with HSiCl3 in the presence of a tert. amine. This compound is subjected to a treatment which varies according to the protected hydroxyl group to eliminate the protective group. In this way, the title silicone of formula I (wherein R1-2 are each an organic group having a phenolic hydroxyl group, R3-6 are each an organic group of a phenolic hydroxyl group; n and m are each a positive integer not including 0; l, o, p and q are each a positive integer including 0, and (n+m)/n+m+l+o+p+q)>0.4), e.g., a compound of formula I (wherein R1 is formula II, R2 is formula III, R3 is formula IV, R4 is formula V, R5 is formula VI and R6 is formula VII.
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