| 摘要 |
PURPOSE:To adjust the optical axis position of an optical system by moving it exactly in parallel without deflecting an optical axis, by providing a transmission type parallel plane plate which can be turned and deflected, in the optical path of the optical system. CONSTITUTION:A rotary base 60 is turned around a Y axis centering around a pin with respect to a fixed base 56, and the optical axis position of a laser light L is moved in parallel to the X direction. In this case, a rough adjustment is executed by rotating moderately the rotary base 60, and thereafter, the side face part of the rotary base 60 is pressed by set-screws 70a, 70b, and the moving extent in the X direction of an optical axis is brought to a fine adjustment. As for the rotary base 60 whose fine adjustment has been ended, a guide pin 66 is directed and screwed into the fixed base 56, by which a flange 66a is pressed against the upper face part of the rotary base 60 and fixed. Subsequently, a parallel plane plate 62 is turned around the X axis through supporting members 72a, 72b, and the optical axis position of the laser light L is moved in the Y direction. As a result, the optical axis of the laser light L can move easily and exactly in parallel to the Z axis.
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