| 摘要 |
PURPOSE:To dispense with sampling and to always perform operation in a proper purifying degree, by providing a plurality of segments capable of measuring the charge quantity of fine particles to a fine particle collection part to also use the same as a measuring part. CONSTITUTION:In a clean bench 11, air in a clean room is sucked by a fan 8 and irradiated with ultraviolet rays in a photoelectron discharge part 9 not only to charge fine particles but also to perform sterilization. The charged fine particles are collected at first by an electrostatic filter 30 in a collection part 10, and an extremely slight amount of the fine particles leaked without being collected are collected by a dust collection plate consisting of a plurality of segments 31-33 and, at the same time, the charge quantity of the fine particles is measured. Then, monitoring is performed so as to obtain aseptic air 25 of a proper purifying degree to perform stable operation for a long time. When the proper purifying degree is not obtained, the charge quantity and air sending quantity to the electrostatic filter 30 are adjusted.
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